Zeiss Sigma 300 VP

The Zeiss Sigma 300 VP represents the latest development in GEMINI® technology and comprises a fully integrated inlens detector (Inlens) for secondary electrons (SE) and an angle selective backscattered electron (HDAsB) detector. The Sigma 300 VP offers ultra high resolution for both SE to image surface information and BSE to present compositional information in the high vacuum mode. Addtionally, a variable pressure (VP) mode is performed using nitrogen as imaging gas at pressures between 10 and 133 Pa. In this mode SE contrast is realised by the dedicated C2D detector and BSE contrast again by the HDAsB. Combined with the large multi-port analytical chamber, the fully motorised 5-axes motorised eucentric stage and the GEMINI® high current mode the Sigma 300 VP also offers superb analytical capabilities.

Key Features

Essential Specifications

Resolution
1.2 nm @ 15 kV
2.2 nm @ 1 kV

Emitter
Thermal Field Emission Gun (FEG), stability > 0.2%/h

Accelerating Voltage
0.02 kV – 30 kV

Probe Current
4 pA – 20 nA; 40 nA – 100 nA @ high current

Detectors
High efficiency In-lens SE detector SE
HDAsB (Angle selective Backscatter) detector for HV and VP mode
Everhart-Thornley Secondary Electron Detector SE, BSE
C2D detector for SE in the variable pressure (VP) mode
EDS Detector Oxford SDD 80 (see below)
Raman spectrometer Witec RISE (see below)

5-Axes Motorised Eucentric Specimen Stage
X, Y = 125 mm / Z= 50 mm
Tilt = -10° – 90°
Rotation = 360° (continuous)

Image Processing
Resolution: Up to 3072 x 2304 pixel
Noise reduction: seven integration and averaging modes
SmartSEMTM, operated by mouse, keyboard, and joystick with optional control panel

Chamber
365 mm(Ø) x 275 mm (h)
EDS port 35° TOA
Two CCD-cameras with IR illumination

Additional Methods
EDS Detector Oxford SDD 80 with special features like large area mapping (LAM), automatic particle analysis etc.
Raman microscope Witec RISE directly flanged on the electron microscope