Electron Microscopic Sample Preparation Unit (EPA101)

About EPA 101:

Technical Data of the Basic Version of the EPA 101:

o Turbomolecular pump 150 liters per second, air-cooled
o Rotation Pump, 2-staged, 8m3 per hour
o Electromagnetic valve control, semi-automatic

o Pirani gauge for supervising turbomolecular pump and airlock system
o Penning type high vacuum gauge at the vacuum chamber

o Lowest pressure without cooling < 10-6 mbar
o Lowest pressure with cooling < 10-7 mbar

Exemplary Devices for the EPA 101: