Electron Microscopic Sample Preparation Unit (EPA101)
About EPA 101:
- Compact construction – transportable device – the standard equipment is built into a 19′ rack system
- Clean CH-free vacuum conditions as a result of the installed turbomolecular pump
- Simple operation – built-in safety devices
- Selecting appropriate devices the unit can be adapted to many different processes
- Cross-shaped high-vacuum chamber ( 1 >> ) providing six vacuum connections (with d=100mm each) enables the performance of very complex preparation processes
- Standard specimen holders, diameter d=54mm ( 9 – 12 >> )
- Based on the standard vacuum flanges, d=100mm ( 16, 17 >> ) the advanced user also may develope and test his own experimental constructions
- Special devices like the Neutral Particle Gun, the Cryo Transfer Module and the optional Airlock System ( 2, 3 >> ) can be combined for extraordinary preparation techniques
- Also the Ion Milling System is designed in view of connecting it with the basic version of our preparation unit
- Modular construction makes it possible, that a simple basic version can be extended according to advanced requirements
- Cleanest vacuum conditions for preparation processes are reached by activating the optional liquid nitrogen cooling device ( 5, 6 >> )
Technical Data of the Basic Version of the EPA 101:
- Vacuum system:
o Turbomolecular pump 150 liters per second, air-cooled
o Rotation Pump, 2-staged, 8m3 per hour
o Electromagnetic valve control, semi-automatic
- Vacuum measuring device:
o Pirani gauge for supervising turbomolecular pump and airlock system
o Penning type high vacuum gauge at the vacuum chamber
- Accessible vacuum values:
o Lowest pressure without cooling < 10-6 mbar
o Lowest pressure with cooling < 10-7 mbar
Exemplary Devices for the EPA 101:
