Three-Dimensional Nano-printing using Focused Electron Beam Induced Deposition: Design, Simulation and Experiments

Dr. Jason Fowlkes
Oak Ridge National Laboratory, Tennessee, USA

What? Physics Colloquium
Where? Hörsaal P2, Petersgasse 16, Technische Universität Graz
When? Tuesday, 31 October 17:15, 16:50 meet the speaker tea

Nanotechnology urgently requires methods for direct 3D fabrication to access materials properties specific to 3D architectures. Direct–write, additive manufacturing using layer-by-layer deposition, or 3D printing, has emerged in recent years as a method to deposit truly 3D objects, at least over the macro- to micro-length scales. Unfortunately, 3D nano-printing methods are few. Focused electron beam-induced deposition, or FEBID, is one such 3D printing method where a focused electron beam is used to selectively dissociate surface bound precursor molecules delivered from the vapor phase. A computer–aided design environment specific to FEBID will be presented that makes the deposition of 3D complex geometries possible. Specifically, the 3D CAD environment facilitates the design and deposition of mesh style objects – examples will be presented for the deposition of metal and metalcarbon composite 3D objects. Example object geometries include cubes, icosahedron and bipyramids. A complementary simulation of FEBID will also be presented which serves as a predictive tool and aides in the design of more complex 3D deposits. The simulation is used to predict the primary electron beam coordinates and beam dwell times required for experimental 3D FEBID simplifying the design–to–experiment process flow which has historically been a mostly trial and error process.

Brief Bio

Dr. Fowlkes is currently a scientific staff member at the Center for Nanophase Materials Sciences located at Oak Ridge National Laboratory.  He is a member of the Nanofabrication Research Laboratory research group at the Center for Nanophase Materials Sciences.  The Nanofabrication Research Laboratory houses a 10,000 ft2 of class 100/1000 clean room space for carrying out material modification using advanced lithographic, etching, thin–film deposition, and characterization tools.  Dr. Fowlkes has authored or co-authored over 100 refereed journal articles.



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Jason Fowlkes at the University of Tennessee

Functional Nanofabrication